Sr. Mechanical Engineer (Vacuum Systems)(E)

Role Summary As a Senior Vacuum Architect, you will own the end‑to‑end vacuum operation scheme—from architecture and contamination control strategy to pump‑down/vent/transfer sequencing, interlocks, and factory acceptance criteria. You will lead cross‑functional design reviews, translate platform requirements into subsystem specifications, and ensure the vacuum system enables world‑class optical performance, reliability, and high‑volume manufacturability. Responsibilities Lead the mechanical design, integration, and validation of complex, multi‑chamber subsystems, ensuring structural stability, precision performance, and robust contamination control. Design and develop ultra‑clean vacuum system hardware, including chamber structures, interfaces, materials/finishes, seals, and internal components. Develop mechanical concepts and detailed designs for chambers, frames, interfaces, mounts, enclosures, and precision mechanisms; create drawings, specifications, and requirements for cross‑functional teams. Drive structural, thermal, fluid, and vibrational analyses to optimize component performance and system stability. Collaborate closely with optics, metrology, electrical, controls/PLC, software, manufacturing, and service teams to ensure subsystem compatibility and seamless system‑level integration. Support vacuum‑related elements across chambers by defining interfaces, mechanical constraints, and performance requirements that integrate with overall system design. Contribute to the development and documentation of vacuum operation schemes and partner with Controls/SE on interlocks and sequencing. Establish and maintain contamination‑control strategies—including materials selection, cleanliness/handling guidelines, and UCV‑grade component practices—and work with Materials Engineering and Supply Chain to evaluate suppliers. Perform first‑order and detailed analyses for pumping configurations, conductance effects, and subsystem‑level performance impacts; collaborate with vacuum specialists as needed for deeper modeling. Lead mechanical and system‑level design reviews (CDR, DDR), ensuring design requirements flow correctly to partner teams. Own integration of chambers and platform structures for vibration isolation, optical stability, and stage dynamic performance. Plan, execute, and oversee test activities—prototype chambers, subsystem test stands, and pre‑factory builds—including instrumentation, test methods, data analysis, and acceptance metrics. Manage risk through FMEA, issue tracking, corrective actions, and design‑for‑reliability improvements across NPI and into HVM. Mentor engineers, establish best practices (DfX, contamination handling, documentation standards), and maintain engineering artifacts and decision rationale for long‑term R&D continuity. Qualifications Education: MS/PhD in Mechanical Engineering or related field (Applied Physics, Materials Science, EE, etc.). Experience: 8–12+ years in mechanical design and integration of complex systems (semiconductor equipment, precision instrumentation, multi‑chamber tools, or equivalent). Technical depth: Strong foundation in mechanical engineering—precision design, structural/thermal/vibration analysis, contamination control, materials/finishes, and system‑level integration. Familiarity with vacuum principles is desired. Tools: Proficiency in 3D CAD/PLM workflows; experience with analysis tools (ANSYS/COMSOL or similar); scripting (Python/Matlab) for data processing and modeling; collaboration with PLC/HMI teams. Soft skills: Demonstrated cross‑functional leadership, clear technical communication, supplier interaction, issue‑resolution ownership, and mentoring experience. Nice‑to‑Have Exposure to EUV‑compatible materials, optical contamination control, or reticle handling/transfer systems. Background with precision metrology, multi‑column imaging systems, or high‑stability mechanical architectures. Minimum Qualifications Doctorate (Academic) Degree and related work experience of 3 years; Master’s Level Degree and related work experience of 6 years; Bachelor’s Level Degree and related work experience of 8 years. Location and Pay Primary Location: USA-CA-Milpitas-KLA Base Pay Range: $141,300.00 - $240,200.00 Benefits KLA’s total rewards package for employees may also include participation in performance incentive programs and eligibility for additional benefits including but not limited to medical, dental, vision, life, and other voluntary benefits, 401(K) including company matching, employee stock purchase program (ESPP), student debt assistance, tuition reimbursement program, development and career growth opportunities and programs, financial planning benefits, wellness benefits including an employee assistance program (EAP), paid time off and paid company holidays, and family care and bonding leave. Interns are eligible for some of the benefits listed. Equal Opportunity Employer KLA is proud to be an Equal Opportunity Employer. We will ensure that qualified individuals with disabilities are provided reasonable accommodation to participate in the job application or interview process, to perform essential job functions, and to receive other benefits and privileges of employment. #J-18808-Ljbffr KLA