Head of System Domain Architecture

Introduction of the job

ASML US brings together some of the brightest minds in science and engineering to develop cutting‑edge e‑beam inspection machines that enable the semiconductor industry to detect and analyze nanoscale defects, helping customers improve yield and accelerate the development of next‑generation microchips.

As the Head of System Domain Architecture in San Jose, you define, own, and continuously evolve the system domain architecture across Business Lines, products, and technology generations. You lead the creation and execution of the System Domain Architecture roadmap across Module Delivery Units (MDUs), ensuring functional alignment and architectural consistency from strategy through delivery.

In this role, you provide architectural leadership by shaping and preparing key architectural changes, resolving escalations with clear trade‑offs, and safeguarding solution quality through coaching and review of domain architects’ work. You are the hierarchical leader of the System Domain Architect team for your domain, accountable for team composition, capability and resource planning, and the people management and development needed to meet domain and delivery demands.

Our headquarters are in Veldhoven, the Netherlands, and we have 18 office locations around the United States including main offices in Chandler, Arizona; San Jose and San Diego, California; Wilton, Connecticut; and Hillsboro, Oregon.

Responsibilities

In this role, you are responsible for ensuring end‑to‑end domain architectural coherence across relevant products and module generations, while driving the functional roadmap to deliver fit‑for‑purpose, cost‑effective, and maintainable solutions including:

• Delivering system level domain specific SEG documents and provide input for design rules.
• Creating domain specific PBS items, and work with SE and D&I teams to optimize work breakdown.
• Coaching Domain technical skills on architectural skills.

Foundation

• Define and maintain the Domain architecture across BL’s, products and generations.
• Develop and maintain Domain Architecture roadmap and coordinating function alignment across Module Delivery Units.
• Plans and prepares the architectural changes and solutions based on roadmap and business need, within the Triple Constraint.
• Resolve escalations tied to architectural implications.
• Reviews work of- and coaches System Domain Architects.
• Defines and maintains the way of working for System Domain Architects, there by taking the needs of neighboring domains into account.
• Ensures that the Domain Architecture meets the System Engineering requirements.

People

• Manage people development and performance of all System Domain architects (5‑10 people), all direct reports.
• Support the technical development of domain architects and senior engineers within the domain, promoting knowledge sharing across teams and lifecycle phases.
• Mentor System Domain Architects.

Education & experience

• BS in engineering or in relevant technical field.
• MSc or PhD preferred in relevant technical field.
• Extensive experience (typically +15 years) in defining architecture within the relevant domain.
• Deep technical expertise and domain knowledge.
• Recognized senior expert with strong relationships across ASML, is recognized as technical domain expert whose judgement is trusted broadly on technical and managerial levels in ASML.
• Customer focused.
• Formulates vision on future developments and applies/stretches the full body of existing and emerging knowledge in a complex domain.
• Able to drive alignment among architects and designers. Able to build broad trusting relationships towards effective negotiation of critical product aspects and has the emotional maturity to stay focus on the cause when challenged personally.
• Strong communicator, enabling clear articulation of complex technical guidance across diverse stakeholder groups.
• Ability to support System Domain Architects and drive a technical topic to an ASML/Customer optimal outcome.
• Experience in leadership.

Skills

Technical & functional skills

• Domain Architecture Roadmap Ownership: Owns and governs the domain architecture roadmap across MDUs and product generations, aligning architecture with the functional roadmap to ensure integrity, commonality, extensibility, and long‑term maintainability.
• Architectural Decision & Escalation Leadership: Leads architecture decisions under scope–time–cost trade‑offs, proactively resolving escalations and conflicting demands by clarifying options, communicating risks, and driving stakeholder alignment to a fit‑for‑purpose outcome.
• Capability & Resource Strategy: Defines domain architecture capability and resourcing strategy, shaping team composition and development priorities to deliver domain technology objectives, sustain execution across lifecycle phases, and build long‑term architectural strength.
• Leadership skills and people management skills.
• Knowledge of all HMI domains.

Behavioral & leadership skills

• Ensures Accountability: The ability to create a clear accountability system where ownership, expectations, and decision rights are explicit; drives consistent follow‑through on commitments across teams; and addresses performance or delivery gaps quickly and constructively, while reinforcing a culture of ownership, learning, and measurable outcomes.
• Demonstrates Self‑awareness: The ability to understand and manage one’s own strengths, limitations, emotions, and impact on others; to actively seek and use feedback; and to adapt behaviors and decisions to improve collaboration, leadership effectiveness, and results, especially in high‑pressure, ambiguous, and complex environments.
• Customer Focus: The ability to anticipate and deeply understand customer needs (external and internal), translate insights into strategy and priorities, and mobilize multiple teams to deliver differentiated value. At this level, Customer Focus means making trade‑offs based on customer impact, closing the loop through measurable outcomes, and ensuring the organization consistently delivers reliable, scalable solutions that strengthen long‑term customer relationships and trust.
• Values Differences: The ability to intentionally seek, respect, and integrate diverse perspectives and working styles to strengthen collaboration and decision quality, ensuring all voices are heard and treated equitably, and enabling inclusive execution across cross‑functional and multicultural stakeholders.
• Builds Effective Teams: The ability to form, align, and develop teams that consistently deliver results by establishing clear goals, roles, and ways of working; fostering trust and inclusion; enabling healthy conflict and accountability; and coaching individuals to grow performance and capability over time.

Other

• This position is located on‑site. It requires onsite presence to attend in‑person work‑related events, trainings and meetings and to further ensure teamwork, collaboration and innovation. A flexible workplace arrangement is available for remote work up to two days a week.
• Routinely required to sit; walk; talk; hear; use hands to keyboard, finger, handle, and feel; stoop, kneel, crouch, twist, reach, and stretch. Occasionally required to move around the campus.
• Occasionally lift and/or move up to 20 pounds.
• May require travel (specify domestic and/or international) dependent on business needs.
• Specific vision abilities required by this job include close vision, color vision, peripheral vision, depth perception, and ability to adjust focus.

Pay and Benefits

The current base annual salary range for this role is currently:

$237,000 - 355,500

Pay scales are determined by role, level, location and alignment with market data. Individual pay is determined through interviews and an assessment of several factors that are unique to each candidate, including but not limited to job‑related skills, relevant education and experience, certifications, abilities of the candidate and pay relative to other team members.

The Company offers employees and their families, medical, dental, vision, and basic life insurance. Employees are able to participate in the Company’s 401k plan. Employees will also receive eight (8) hours of vacation leave every month and 13 paid holidays throughout the calendar year.

Inclusion and diversity

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

Request an Accommodation

ASML provides reasonable accommodations to applicants for ASML employment and ASML employees with disabilities. An accommodation is a change in work rules, facilities, or conditions which enable an individual with a disability to apply for a job, perform the essential functions of a job, and/or enjoy equal access to the benefits and privileges of employment. If you are in need of an accommodation to complete an application, participate in an interview, or otherwise participate in the employee pre‑selection process, please send an email to View email address on click.appcast.io to initiate the company’s reasonable accommodation process.

Please note: This email address is solely intended to provide a method for applicants to initiate ASML’s process to request accommodation(s). Any recruitment questions should be directed to the designated Talent Acquisition member for the position.