Principal Systems Engineer
$160k - $240kOnto Innovation
Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: 3D metrology spanning the chip from nanometer-scale transistors to micron-level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Job Summary & Responsibilities We are seeking a highly experienced Principal Systems Engineer to lead the architecture, integration, and validation of complex systems for advanced semiconductor Films and OCD metrology equipment. This role requires deep technical leadership across multidisciplinary domains, including optics, mechanics, electronics, software, and controls. The Principal Systems Engineer will define system-level requirements, ensure cross-functional alignment, and drive technical execution from concept through production. This individual serves as the technical authority and plays a critical role in solving complex system-level challenges impacting performance, reliability, and scalability. Key Responsibilities System Architecture & Technical Leadership Define and own system architecture for complex, high-precision equipment. Translate product requirements into detailed system specifications and subsystem requirements. Lead trade studies, system partitioning, and design decisions across multiple engineering disciplines. Serve as the technical lead and decision-maker for system-level design reviews. Requirements & Interface Management Develop, manage, and maintain system requirements, including traceability and validation. Define and control system interfaces (mechanical, electrical, optical, software). Ensure alignment between subsystem designs and overall system performance requirements. Integration & Validation Lead system integration efforts, identifying and resolving cross-domain issues. Develop system-level test plans, validation strategies, and acceptance criteria. Drive root cause analysis and resolution of system performance issues. Performance & Reliability Engineering Establish system error budgets, performance models, and sensitivity analyses. Ensure system stability under environmental conditions (thermal, vibration, contamination). Lead design for reliability, maintainability, and manufacturability at the system level. Cross-Functional Collaboration Collaborate with optical, mechanical, electrical, and software engineering teams. Interface with product management, manufacturing, quality, and field service teams. Mentor junior engineers and influence technical direction across the organization. Program Execution Support project planning, risk assessment, and milestone delivery. Identify technical risks and implement mitigation strategies. Support customer engagements and translate application needs into system capabilities. Qualifications Master’s degree in Engineering (Mechanical, Electrical, Optical, Physics, or related field). 10+ years of experience in complex system design and integration. Proven experience in systems engineering within semiconductor equipment, photonics, aerospace, or precision instrumentation industries. Strong understanding of multidisciplinary systems (mechanics, optics, electronics, controls, and software). Demonstrated ability to lead technical teams and influence cross-functional stakeholders. Preferred Qualifications Experience with semiconductor metrology, inspection, or lithography systems. Knowledge of precision motion systems, optics, vacuum systems, or laser-based instrumentation. Familiarity with modeling and simulation tools (e.g., MATLAB/Simulink). Experience defining system error budgets and performance modeling. Exposure to cleanroom environments and high-reliability systems. Key Competencies Strategic thinking with strong system-level perspective. Exceptional problem-solving and debugging skills in complex systems. Strong leadership and technical mentorship capabilities. Effective communication across technical and non-technical stakeholders. Ability to manage ambiguity and drive decisions in complex environments. Why Join Onto Innovation? At Onto Innovation, we believe your work should matter—and so should your well-being. That’s why we offer competitive salaries and a comprehensive benefits package designed to support you and your family. From health, dental, and vision coverage to life and disability insurance, PTO, and a 401(k) with employer match, we’ve got you covered. You’ll also enjoy access to our Employee Stock Purchase Program (ESPP), wellness initiatives, and cutting-edge tools—all within a collaborative, inclusive culture where your contributions are valued and recognized. Compensation & Growth • Base Salary Range: $160,000.00 - $240,000.00, offered in good faith and based on experience, location, and qualifications. Additional Rewards: Annual bonus opportunities and potential long-term incentives tied to both company and individual success. Empowering Every Voice to Shape the Future: Onto Innovation is committed to creating a workplace where every qualified candidate has an equal opportunity to succeed. We evaluate applicants based on skills, experience, and potential - without regard to race, color, religion, gender, sexual orientation, national origin, age, disability, veteran status, or any other characteristic protected by law. We believe diversity of thought and background drives innovation and strengthens our team. Important Note on Export Compliance For certain positions requiring access to technical data, U.S. export licensing review may be necessary for applicants who are not U.S. Citizens, Permanent Residents, or other protected persons under 8 U.S.C. 1324b(a)(3). Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: 3D metrology spanning the chip from nanometer-scale transistors to micron-level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain help our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Headquartered in Wilmington, Massachusetts, Onto Innovation supports customers with a worldwide sales and service organization. Additional information can be found at
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