Sr. Field Service Engineer

Plasma-Therm is a leading provider of advanced processing equipment and solutions, specializing in semiconductor manufacturing. At Plasma-Therm, we’ve been innovating plasma processing technologies since 1974. We design and build easy-to-use wafer processing platforms for standard and advanced processes used in microelectronics manufacturing and R&D applications. Our platforms are the centerpiece of our application solutions and cover a wide variety of process steps including etch, deposition, material modification and die singulation. In addition, our platforms are configurable to help you get the equipment and features you need. Since the very beginning, we’ve focused on developing plasma-based technologies and equipment processing tools that deliver excellent value. That is our calling card. We grew organically through acquisitions and strategic partnerships so we could offer broader solutions. Today, we are a solid, reliable, and trusted partner. From 300mm on down the line, you get proven system solutions at a competitive price/value equation, with process knowledge and service attention that will exceed your expectations. Shift / Travel: Field Service Support with On-Call Rotation and Domestic/International Travel as Required Position Overview The Senior Field Service Engineer IV (FSE IV) serves as a lead technical expert responsible for installation, startup, advanced troubleshooting, preventive maintenance, upgrades, and customer support for Quazar Ion Beam systems used in advanced semiconductor processing environments. In this high-visibility role, the FSE IV will support ion beam etch and related beamline-based equipment, ensuring safe, reliable tool performance while providing strong technical leadership during customer escalations, tool-down events, and field-driven corrective actions. The ideal candidate brings deep hands-on expertise with high-vacuum systems, ion source operation, beam tuning, RF/DC power delivery, electrostatic and magnetic beam control, gas delivery, motion/robotics, endpoint/process control, and complex electromechanical troubleshooting, along with strong customer-facing communication skills in high-pressure fab environments. Key Responsibilities Complete hands-on training on Quazar Ion Beam system architecture, subsystem operation, maintenance procedures, safety requirements, and field service best practices. Work directly with engineering and manufacturing teams during system build, configuration, testing, and initial tool integration activities. Help capture, review, and refine service procedures, preventive maintenance protocols, commissioning checklists, and troubleshooting guides for field deployment. Lead and support on-site tool move-in, set-in-place activities, facility hookup verification, chamber preparation, vacuum pump-down, and system power-on for Quazar Ion Beam installations. Execute pre-commissioning checks, interlock verification, gas flow validation, vacuum integrity checks, ion source startup, beam tuning support, and Final Acceptance Testing (FAT). Interface directly with customer fab engineers, facilities teams, process engineers, and rigging contractors to maintain installation schedules and resolve startup issues quickly. 3. Advanced Technical Troubleshooting & Ion Beam System Support Perform routine preventive maintenance and unscheduled corrective maintenance on Quazar Ion Beam systems under customer response-time expectations. Lead root-cause failure analysis for complex ion source, beam stability, RF/DC power, gas delivery, high-vacuum, wafer handling, motion control, cooling, safety interlock, and electromechanical escalations. Author and drive 8D Quality/Failure Reports to closure in collaboration with engineering, manufacturing, technical support, and customer stakeholders. Serve as the primary technical point of contact during critical tool-down scenarios, providing clear status updates, next steps, risk items, and recovery plans to customer fab management. Ensure strict adherence to customer safety, cleanroom, high-voltage, RF, vacuum, gas handling, and Lockout/Tagout (LOTO) protocols. Mentor and train peer engineers, supporting the development of internal SOPs, troubleshooting guides, service reports, and training logs for Quazar Ion Beam support. Required Qualifications & Experience Education: Associate’s or Bachelor’s degree in Electrical/Mechanical Engineering, Chemical Engineering, Mechatronics, Semiconductor Technology, or equivalent military technical experience. Experience: 8+ years of direct field service or equipment engineering experience in semiconductor capital equipment manufacturing or advanced wafer fabs. Technical Skills: Ion Beam System Expertise: Deep knowledge of ion source operation, beam extraction and tuning, beamline components, neutralization, gas delivery, endpoint/process monitoring, chamber conditioning, and process-impacting hardware variables. High-Vacuum and Power Delivery: Proficiency with turbomolecular and dry pumps, vacuum gauges, leak checking, RF/DC generators, matching networks, high-voltage power supplies, and related safety practices. Hands-on experience reading complex electrical schematics, vacuum diagrams, gas delivery schematics, interlock logic, PLC/HMI screens, and software diagnostic logs. Strong working knowledge of cleanroom safety protocols, high-voltage/RF safety, compressed and process gas safety, vacuum safety, robotics safety, and LOTO procedures. Soft Skills: Exceptional written and verbal communication skills for customer escalation management. Strong problem-solving mindset using structured problem-solving methodologies (e.g., 8D, 5 Whys). Ability to work independently in a fast-paced fab environment and handle high-pressure customer situations. Preferred Qualifications Prior experience with ion beam etch, ion milling, ion implantation, dry etch, or other beamline/high-vacuum semiconductor processing equipment. Prior experience working within high-volume 200mm or 300mm wafer fabrication facilities. Familiarity with enterprise tracking tools such as Jira, ERP systems, service case management tools, and field action tracking processes. Work Environment & Physical Requirements Must be able to work inside semiconductor cleanroom environments requiring full gowning protocol and appropriate PPE while servicing high-vacuum, RF, high-voltage, gas delivery, and motion-control subsystems. Must be able to lift up to 50 lbs, bend, stoop, and stand for extended periods. Flexibility to travel for product training, customer installations, escalations, and field support needs while participating in on-call rotations as customer demand dictates. #J-18808-Ljbffr Plasma-Therm, LLC