Senior Director of Software Engineering

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: 3D metrology spanning the chip from nanometer-scale transistors to micron-level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Job Summary & Responsibilities Position Overview Onto Innovation is seeking a highly accomplished Senior Director of Software Engineering to lead the software development function for our Metrology product group, supporting next-generation semiconductor process control and inspection systems. In this role, you will set the technical vision, architecture strategy, and execution discipline for software that powers advanced metrology equipment. You will lead and scale a high-performing team responsible for low-level system software, hardware integration, and customer-driven solutions, ensuring delivery of high-quality, reliable, and innovative products. This position requires a strong blend of hands-on technical expertise, organizational leadership, and cross-functional collaboration across engineering, product management, and customer-facing teams. Key Responsibilities Leadership & Strategy Lead, mentor, and grow a team of software engineers, managers, and technical leads within the Metrology group Define and execute the software engineering roadmap, aligning with product strategy and customer requirements Establish best practices in software architecture, development processes, and quality standards Drive a culture of technical excellence, innovation, and accountability Partner with executive leadership to support long-term technology and business objectives Software Development & Architecture Oversee the design, development, and optimization of low-level and application-layer software for semiconductor metrology systems Guide development of robust .NET-based applications using C#, WPF, and modern frameworks Ensure scalable, maintainable architectures for high-performance, real-time systems Drive modernization initiatives, including tools, frameworks, and development environments Systems & Hardware Integration Provide technical leadership for hardware-software integration, including control interfaces via TCP/IP, serial communication, and other protocols Oversee implementation of client-server architectures using WCF, TCP/IP, and related communication technologies Ensure software reliability in mission-critical environments interacting with precision hardware systems Cross-Functional Collaboration Collaborate closely with product management, systems engineering, and customers to translate requirements into technical solutions Engage with global teams to ensure alignment across engineering, manufacturing, and field support Influence product direction through deep understanding of customer needs and semiconductor process challenges Quality & Execution Establish and enforce best practices in code reviews, unit testing, system validation, and CI/CD pipelines Drive continuous improvement in development efficiency, software quality, and release predictability Ensure compliance with industry standards and internal quality benchmarks Qualifications Bachelor’s or Master’s degree in Computer Science, Software Engineering, or related field 10+ years of software development experience, including significant leadership experience (Director or Senior Manager level) Strong expertise in C#, .NET, and WPF application development Experience with distributed systems, client-server architectures, and networking protocols (TCP/IP, WCF) Proven experience integrating software with complex hardware systems Demonstrated ability to lead teams delivering high-performance, mission-critical systems Preferred Experience in semiconductor equipment, metrology, or inspection systems Background in real-time systems, instrumentation, or industrial automation Familiarity with low-level communication protocols and hardware interfaces Experience scaling global engineering teams Why Join Onto Innovation? At Onto Innovation, we believe your work should matter—and so should your well-being. That’s why we offer competitive salaries and a comprehensive benefits package designed to support you and your family. From health, dental, and vision coverage to life and disability insurance, PTO, and a 401(k) with employer match, we’ve got you covered. You’ll also enjoy access to our Employee Stock Purchase Program (ESPP), wellness initiatives, and cutting-edge tools—all within a collaborative, inclusive culture where your contributions are valued and recognized. Compensation & Growth • Base Salary Range: $184,000.00 - $276,000.00, offered in good faith and based on experience, location, and qualifications. Additional Rewards: Annual bonus opportunities and potential long-term incentives tied to both company and individual success. Empowering Every Voice to Shape the Future: Onto Innovation is committed to creating a workplace where every qualified candidate has an equal opportunity to succeed. We evaluate applicants based on skills, experience, and potential - without regard to race, color, religion, gender, sexual orientation, national origin, age, disability, veteran status, or any other characteristic protected by law. We believe diversity of thought and background drives innovation and strengthens our team. Important Note on Export Compliance For certain positions requiring access to technical data, U.S. export licensing review may be necessary for applicants who are not U.S. Citizens, Permanent Residents, or other protected persons under 8 U.S.C. 1324b(a)(3). Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: 3D metrology spanning the chip from nanometer-scale transistors to micron-level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain help our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Headquartered in Wilmington, Massachusetts, Onto Innovation supports customers with a worldwide sales and service organization. Additional information can be found at